JPS6267227U - - Google Patents
Info
- Publication number
- JPS6267227U JPS6267227U JP15889885U JP15889885U JPS6267227U JP S6267227 U JPS6267227 U JP S6267227U JP 15889885 U JP15889885 U JP 15889885U JP 15889885 U JP15889885 U JP 15889885U JP S6267227 U JPS6267227 U JP S6267227U
- Authority
- JP
- Japan
- Prior art keywords
- hole
- pressure rod
- spacer
- metal case
- plate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 125000006850 spacer group Chemical group 0.000 claims description 6
- 229910052710 silicon Inorganic materials 0.000 claims description 2
- 239000010703 silicon Substances 0.000 claims description 2
- 239000002184 metal Substances 0.000 claims 9
- 238000009792 diffusion process Methods 0.000 claims 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims 1
Landscapes
- Measuring Fluid Pressure (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15889885U JPH0432587Y2 (en]) | 1985-10-16 | 1985-10-16 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15889885U JPH0432587Y2 (en]) | 1985-10-16 | 1985-10-16 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6267227U true JPS6267227U (en]) | 1987-04-27 |
| JPH0432587Y2 JPH0432587Y2 (en]) | 1992-08-05 |
Family
ID=31082819
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15889885U Expired JPH0432587Y2 (en]) | 1985-10-16 | 1985-10-16 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0432587Y2 (en]) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2017142150A (ja) * | 2016-02-10 | 2017-08-17 | ミネベアミツミ株式会社 | 圧力センサ及び装置 |
| JP2024026823A (ja) * | 2020-08-12 | 2024-02-28 | アルプスアルパイン株式会社 | 荷重センサ装置 |
-
1985
- 1985-10-16 JP JP15889885U patent/JPH0432587Y2/ja not_active Expired
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2017142150A (ja) * | 2016-02-10 | 2017-08-17 | ミネベアミツミ株式会社 | 圧力センサ及び装置 |
| JP2024026823A (ja) * | 2020-08-12 | 2024-02-28 | アルプスアルパイン株式会社 | 荷重センサ装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0432587Y2 (en]) | 1992-08-05 |